Invention Grant
- Patent Title: Method of manufacturing display device
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Application No.: US15265868Application Date: 2016-09-15
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Publication No.: US10676811B2Publication Date: 2020-06-09
- Inventor: Heung Yeol Na , Dong Wook Kim , Jae Wan Seol , Seong Ho Jeong
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Lewis Roca Rothgerber Christie LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@543599e6
- Main IPC: C23C14/12
- IPC: C23C14/12 ; C23C14/24 ; G06F3/00 ; H01L51/00

Abstract:
A method of manufacturing a display device is provided. A method of manufacturing a display device comprises preparing a thin film forming apparatus including a crucible, which stores a source material for forming a thin film, and a front heatsink, which is disposed on the crucible and includes a reflective plate, wherein the reflective plate has a first surface with a first reflectivity and a second surface with a second reflectivity, which is different from the first reflectivity; and forming a thin film on a substrate by evaporating the source material of the thin film forming apparatus.
Public/Granted literature
- US20170252774A1 METHOD OF MANUFACTURING DISPLAY DEVICE Public/Granted day:2017-09-07
Information query
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