公开(公告)号：US10676811B2

公开(公告)日：2020-06-09

申请号：US15265868

申请日：2016-09-15

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Heung Yeol Na ,  Dong Wook Kim ,  Jae Wan Seol ,  Seong Ho Jeong

IPC: C23C14/12 ,  C23C14/24 ,  G06F3/00 ,  H01L51/00

Abstract: A method of manufacturing a display device is provided. A method of manufacturing a display device comprises preparing a thin film forming apparatus including a crucible, which stores a source material for forming a thin film, and a front heatsink, which is disposed on the crucible and includes a reflective plate, wherein the reflective plate has a first surface with a first reflectivity and a second surface with a second reflectivity, which is different from the first reflectivity; and forming a thin film on a substrate by evaporating the source material of the thin film forming apparatus.