Invention Grant
- Patent Title: System, method and non-transitory computer readable medium for tuning sensitivies of, and determining a process window for, a modulated wafer
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Application No.: US15813004Application Date: 2017-11-14
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Publication No.: US10679909B2Publication Date: 2020-06-09
- Inventor: David Craig Oram , Abhinav Mathur , Kenong Wu , Eugene Shifrin
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-TENCOR CORPORATION
- Current Assignee: KLA-TENCOR CORPORATION
- Current Assignee Address: US CA Milpitas
- Agency: Zilka-Kotab, P.C.
- Main IPC: H01L21/66
- IPC: H01L21/66 ; G01N21/88 ; H01L21/67 ; G01N21/95
Abstract:
A system, method, and non-transitory computer readable medium are provided for tuning sensitivities of, and determining a process window for, a modulated wafer. The sensitivities for dies of the modulated wafer are tuned dynamically based on a single set of parameters. Further, the process window is determined for the modulated wafer from prior determined parameter-specific nominal process windows.
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