- 专利标题: Oxide semiconductor device
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申请号: US16121708申请日: 2018-09-05
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公开(公告)号: US10680111B2公开(公告)日: 2020-06-09
- 发明人: Shunpei Yamazaki , Miyuki Hosoba , Junichiro Sakata , Hideaki Kuwabara
- 申请人: Semiconductor Energy Laboratory Co., Ltd.
- 申请人地址: JP Atsugi-shi, Kanagawa-ken
- 专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人地址: JP Atsugi-shi, Kanagawa-ken
- 代理机构: Fish & Richardson P.C.
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@4727189
- 主分类号: H01L27/00
- IPC分类号: H01L27/00 ; H01L29/00 ; G02F1/1362 ; H01L29/786 ; H01L27/12 ; H01L29/66 ; H01L29/45 ; H01L29/51 ; G02F1/167 ; G02F1/136 ; H01L27/32 ; G02F1/1339 ; G02F1/1343 ; G02F1/1345 ; G02F1/1368 ; G09G3/34 ; G09G3/36
摘要:
An object is to provide a semiconductor device having a structure in which parasitic capacitance between wirings can be efficiently reduced. In a bottom gate thin film transistor using an oxide semiconductor layer, an oxide insulating layer used as a channel protection layer is formed above and in contact with part of the oxide semiconductor layer overlapping with a gate electrode layer, and at the same time an oxide insulating layer covering a peripheral portion (including a side surface) of the stacked oxide semiconductor layer is formed. Further, a source electrode layer and a drain electrode layer are formed in a manner such that they do not overlap with the channel protection layer. Thus, a structure in which an insulating layer over the source electrode layer and the drain electrode layer is in contact with the oxide semiconductor layer is provided.
公开/授权文献
- US20190019895A1 SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF 公开/授权日:2019-01-17
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