Invention Grant
- Patent Title: Acoustic wave sensor
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Application No.: US15679162Application Date: 2017-08-17
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Publication No.: US10684163B2Publication Date: 2020-06-16
- Inventor: Alfons Dehe , Manuel Dorfmeister , Ulrich Schmid , Michael Schneider
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee: INFINEON TECHNOLOGIES AG
- Current Assignee Address: DE Neubiberg
- Agency: Viering, Jentschura & Partner MBB
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@6cc693cf
- Main IPC: G01H11/08
- IPC: G01H11/08 ; H04R17/02 ; H04R31/00 ; H01L41/083

Abstract:
An acoustic wave sensor may include: a continuous membrane deflectable by acoustic waves to be detected, and a piezoelectric layer provided on the membrane and including a plurality of piezoelectric layer portions respectively equipped with at least two individual electric contact structures configured to electrically connect the respective piezoelectric layer portions. Electric contact structures associated with different piezoelectric layer portions may be separated from each other.
Public/Granted literature
- US20180052042A1 ACOUSTIC WAVE SENSOR Public/Granted day:2018-02-22
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