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公开(公告)号：US20180279055A1
公开(公告)日：2018-09-27
申请号：US15928821
申请日：2018-03-22
发明人： Alfons Dehe , Yauheni Belahurau , Manuel Dorfmeister , Christoph Glacer , Manfred Kaltenbacher , Ulrich Schmid , Michael Schneider , David Tumpold
IPC分类号： H04R19/02
CPC分类号： H04R19/02 , H04R1/005 , H04R17/00 , H04R2201/003
摘要： A microelectromechanical loudspeaker may include: a plurality of elementary loudspeakers each including a drive unit and a diaphragm deflectable by the drive unit, and a controller configured to respectively supply control signals to the drive units. The drive units may be respectively configured to deflect the corresponding diaphragms according to the respective control signals supplied by the controller to generate acoustic waves. The control signal supplied to at least one control unit may have at least one local extremum and a global extremum of a curvature of the control signal with a highest absolute value of the curvature may be located at a position of the control signal preceding a position of the at least one local extremum of the control signal.
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公开(公告)号：US09939331B2
公开(公告)日：2018-04-10
申请号：US14284198
申请日：2014-05-21
发明人： Jonathan Silvano de Sousa , Tobias Frischmuth , Peter Irsigler , Ulrich Schmid , Thomas Grille , Ursula Hedenig , Sylvicley Figueira da Silva
CPC分类号： G01K7/34 , B81B3/0021 , G01K1/024 , G01K13/002
摘要： Various embodiments disclosed herein include a capacitive thermometer including a deflectable membrane and a sense electrode. The deflectable membrane is configured to adjust a capacitive value based on a temperature of the deflectable membrane.
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公开(公告)号：US20170325025A1
公开(公告)日：2017-11-09
申请号：US15145862
申请日：2016-05-04
发明人： Manuel Dorfmeister , Michael Schneider , Manfred Kaltenbacher , Alfons Dehe , Ursula Hedenig , Thomas Grille , Ulrich Schmid
摘要： Aspects of a microelectromechanical device, an array of microelectromechanical devices, a method of manufacturing a microelectromechanical device, and a method of operating a microelectromechanical device, are discussed herein. The microelectromechanical device may include: a substrate; a diaphragm mechanically coupled to the substrate, the diaphragm comprising a stressed region to buckle the diaphragm into one of two geometrically stable positions; an actuator mechanically coupled to the diaphragm, the actuator comprising a piezoelectric layer over the diaphragm; a controller configured to provide an electrical control signal in response to a digital sound input; wherein the actuator is configured to receive the electrical control signal to exert a mechanical piezoelectric force on the diaphragm via the piezoelectric layer to move the diaphragm to create a sound wave.
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4.发明授权公开(公告)号：US11237090B2
公开(公告)日：2022-02-01
申请号：US16807698
申请日：2020-03-03
发明人： Michael Schneider , Alfons Dehe , Manuel Dorfmeister , Christoph Glacer , Ulrich Krumbein , Ulrich Schmid , David Tumpold
IPC分类号： G01N15/06
摘要： A sensor element includes a membrane structure suspended on a frame structure, wherein the membrane structure includes a membrane element and an actuator. The membrane structure is deflectable in a first stable deflection state and in a second stable deflection state and is operable in a resonance mode in at least one of the first and the second stable deflection states. The actuator is configured to deflect the membrane structure in a first actuation state into one of the first and the second stable deflection states, and to operate the membrane structure in a second actuation state in a resonance mode having an associated resonance frequency.
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公开(公告)号：US10684163B2
公开(公告)日：2020-06-16
申请号：US15679162
申请日：2017-08-17
IPC分类号： G01H11/08 , H04R17/02 , H04R31/00 , H01L41/083
摘要： An acoustic wave sensor may include: a continuous membrane deflectable by acoustic waves to be detected, and a piezoelectric layer provided on the membrane and including a plurality of piezoelectric layer portions respectively equipped with at least two individual electric contact structures configured to electrically connect the respective piezoelectric layer portions. Electric contact structures associated with different piezoelectric layer portions may be separated from each other.
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公开(公告)号：US10081533B2
公开(公告)日：2018-09-25
申请号：US14448767
申请日：2014-07-31
发明人： Ulrich Schmid , Tobias Frischmuth , Peter Irsigler , Thomas Grille , Daniel Maurer , Ursula Hedenig , Markus Kahn , Günter Denifl
IPC分类号： B81B3/00 , B06B1/02 , B81C1/00 , H04R19/02 , H04R19/04 , H04R31/00 , H04R7/24 , H04R7/02 , H04R19/00
CPC分类号： B81B3/0021 , B06B1/02 , B81B3/007 , B81B2201/0257 , B81B2201/0264 , B81B2203/0109 , B81B2203/0118 , B81B2203/0127 , B81B2203/051 , B81C1/00142 , B81C1/0015 , B81C1/00158 , B81C1/00373 , B81C2201/0176 , B81C2201/0181 , B81C2201/019 , H04R7/02 , H04R7/24 , H04R19/005 , H04R19/02 , H04R19/04 , H04R31/00 , H04R31/003 , H04R2201/003 , H04R2307/023 , H04R2400/01 , H04R2499/11
摘要： A micromechanical structure includes a substrate and a functional structure arranged at the substrate. The functional structure has a functional region configured to deflect with respect to the substrate responsive to a force acting on the functional region. The functional structure includes a conductive base layer and a functional structure comprising a stiffening structure having a stiffening structure material arranged at the conductive base layer and only partially covering the conductive base layer at the functional region. The stiffening structure material includes a silicon material and at least a carbon material.
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公开(公告)号：US20180052042A1
公开(公告)日：2018-02-22
申请号：US15679162
申请日：2017-08-17
IPC分类号： G01H11/08 , H01L41/083
摘要： An acoustic wave sensor may include: a continuous membrane deflectable by acoustic waves to be detected, and a piezoelectric layer provided on the membrane and including a plurality of piezoelectric layer portions respectively equipped with at least two individual electric contact structures configured to electrically connect the respective piezoelectric layer portions. Electric contact structures associated with different piezoelectric layer portions may be separated from each other.
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公开(公告)号：US20160353210A1
公开(公告)日：2016-12-01
申请号：US14724224
申请日：2015-05-28
发明人： Ulrich Schmid , Tobias Frischmuth , Peter Irsigler , Thomas Grille , Daniel Maurer , Ursula Hedenig , Markus Kahn , Guenter Denifl , Michael Schneider
CPC分类号： B81C1/00158 , B81B3/007 , B81B3/0072 , B81B2201/0257 , B81B2203/0118 , B81B2203/0127 , B81C2201/0167 , B81C2201/0177 , B81C2201/0181 , H04R2201/003
摘要： A micromechanical structure comprises a substrate and a functional structure arranged at the substrate. The functional structure comprises a functional region which is deflectable with respect to the substrate responsive to a force acting on the functional region. The functional structure comprises a carbon layer arrangement, wherein a basis material of the carbon layer arrangement is a carbon material.
摘要翻译： 微机械结构包括衬底和布置在衬底上的功能结构。 功能结构包括响应于作用在功能区域上的力而相对于衬底可偏转的功能区域。 功能结构包括碳层布置，其中碳层布置的基础材料是碳材料。
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公开(公告)号：US20160031701A1
公开(公告)日：2016-02-04
申请号：US14448767
申请日：2014-07-31
发明人： Ulrich Schmid , Tobias Frischmuth , Peter Irsigler , Thomas Grille , Daniel Maurer , Ursula Hedenig , Markus Kahn , Günter Denifl
CPC分类号： B81B3/0021 , B06B1/02 , B81B3/007 , B81B2201/0257 , B81B2201/0264 , B81B2203/0109 , B81B2203/0118 , B81B2203/0127 , B81B2203/051 , B81C1/00142 , B81C1/0015 , B81C1/00158 , B81C1/00373 , B81C2201/0176 , B81C2201/0181 , B81C2201/019 , H04R7/02 , H04R7/24 , H04R19/005 , H04R19/02 , H04R19/04 , H04R31/00 , H04R31/003 , H04R2201/003 , H04R2307/023 , H04R2400/01 , H04R2499/11
摘要： A micromechanical structure includes a substrate and a functional structure arranged at the substrate. The functional structure has a functional region configured to deflect with respect to the substrate responsive to a force acting on the functional region. The functional structure includes a conductive base layer and a functional structure comprising a stiffening structure having a stiffening structure material arranged at the conductive base layer and only partially covering the conductive base layer at the functional region. The stiffening structure material includes a silicon material and at least a carbon material.
摘要翻译： 微机械结构包括衬底和布置在衬底上的功能结构。 功能结构具有功能区域，其被配置为响应于作用在功能区域上的力而相对于衬底偏转。 该功能结构包括导电基底层和功能结构，该功能结构包括具有布置在导电基底层处并且仅在功能区域部分地覆盖导电基底层的加强结构材料的加强结构。 加强结构材料包括硅材料和至少一种碳材料。
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公开(公告)号：US09212045B1
公开(公告)日：2015-12-15
申请号：US14448783
申请日：2014-07-31
发明人： Ulrich Schmid , Tobias Frischmuth , Peter Irsigler , Thomas Grille , Daniel Maurer , Ursula Hedenig , Markus Kahn , Guenter Denifl
CPC分类号： B81C1/00658 , B81B2201/0257 , B81B2203/0127 , H04R19/005 , H04R31/00 , H04R2307/023
摘要： A micro mechanical structure includes a substrate and a functional structure arranged at the substrate. The functional structure includes a functional region which is deflectable with respect to the substrate responsive to a force acting on the functional region. The functional structure further includes a conductive base layer having a conductive base layer material. The conductive base layer material includes sectionally in a stiffening section a carbon material such that a carbon concentration of the carbon material in the conductive base layer material is at least 1014 per cubic cm and at least higher by a factor of 103 than in the conductive base layer material adjacent to the stiffening section.
摘要翻译： 微机械结构包括衬底和布置在衬底上的功能结构。 功能结构包括响应于作用在功能区上的力而相对于衬底可偏转的功能区域。 功能结构还包括具有导电性基底层材料的导电性基底层。 导电基层材料在硬化部分中包括碳材料，使得导电基材层材料中的碳材料的碳浓度至少为1014每立方厘米，并且至少高于导电基体中的103倍 邻近加强部分的层材料。
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