Invention Grant
- Patent Title: Laser sustained plasma light source with forced flow through natural convection
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Application No.: US16043764Application Date: 2018-07-24
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Publication No.: US10690589B2Publication Date: 2020-06-23
- Inventor: Ilya Bezel , Kenneth P. Gross , John Szilagyi
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G01N21/21
- IPC: G01N21/21 ; H01J65/04 ; H05H1/24 ; G01N21/25

Abstract:
A broadband radiation source is disclosed. The system may include a plasma containment vessel configured to receive laser radiation from a pump source to sustain a plasma within gas flowed through the plasma containment vessel. The plasma containment vessel may be further configured to transmit at least a portion of broadband radiation emitted by the plasma. The system may also include a recirculation gas loop fluidically coupled to the plasma containment vessel. The recirculation gas loop may be configured to transport heated gas from an outlet of the plasma containment vessel, and further configured to transport cooled gas to an inlet of the plasma containment vessel.
Public/Granted literature
- US20190033204A1 Laser Sustained Plasma Light Source with Forced Flow Through Natural Convection Public/Granted day:2019-01-31
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