Invention Grant
- Patent Title: Radiation shield
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Application No.: US15672119Application Date: 2017-08-08
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Publication No.: US10692741B2Publication Date: 2020-06-23
- Inventor: Melvin Verbaas
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holdings B.V.
- Current Assignee: ASM IP Holdings B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: H01L21/67
- IPC: H01L21/67 ; C23C16/48 ; H01L21/687 ; C23C16/458 ; H01J37/32
Abstract:
A radiation shield and an assembly and a reactor including the radiation shield are disclosed. The radiation shield can be used to control heat flux from a susceptor heater assembly and thereby enable better control of temperatures across a surface of a substrate placed on a surface of the susceptor heater assembly.
Public/Granted literature
- US20190051544A1 RADIATION SHIELD Public/Granted day:2019-02-14
Information query
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