Invention Grant
- Patent Title: Thin film transistor array substrate, display apparatus, and method of manufacturing thin film transistor array substrate
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Application No.: US16047248Application Date: 2018-07-27
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Publication No.: US10700104B2Publication Date: 2020-06-30
- Inventor: Jinwoo Lee , Waljun Kim , Kiwan Ahn , Yongjae Jang , Jaehyuk Jang , Yugwang Jeong
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si, Gyeonggi-Do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si, Gyeonggi-Do
- Agency: F. Chau & Associates, LLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@3c6aab7
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/423 ; G09G3/3266 ; G09G3/3275 ; H01L29/417 ; G09G3/3233 ; H01L29/786 ; H01L27/32

Abstract:
A thin film transistor array substrate includes: a first conductive layer including first lines for transmitting data signals to the thin film transistors; a second conductive layer disposed on the first conductive layer and including second lines for supplying a driving voltage to the thin film transistors; a first insulating layer disposed between a semiconductor layer and the first conductive layer and including a first material layer; a second insulating layer disposed between the first conductive layer and the second conductive layer and including a second material layer having a dielectric constant greater than that of the first material layer; and a contact plug penetrating the second insulating layer and the first insulating layer, and connecting the second conductive layer to the semiconductor layer. A taper angle of the contact plug in the second material layer is greater than that of the contact plug in the first material layer.
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