Invention Grant
- Patent Title: Methods of forming and using materials containing silicon and nitrogen
-
Application No.: US15971398Application Date: 2018-05-04
-
Publication No.: US10700271B2Publication Date: 2020-06-30
- Inventor: Eugene P. Marsh
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L21/02 ; C23C16/34

Abstract:
Some embodiments include methods utilizing atomic layer deposition to form material containing silicon and nitrogen (e.g., silicon nitride). The atomic layer deposition uses SiI4 as one precursor and uses a nitrogen-containing material as another precursor. Some embodiments include methods of forming a structure in which a chalcogenide region is formed over a semiconductor substrate; and in which SiI4 is used as a precursor during formation of silicon nitride material directly against a surface of the chalcogenide region.
Public/Granted literature
- US20180254413A1 Methods of Forming and Using Materials Containing Silicon and Nitrogen Public/Granted day:2018-09-06
Information query
IPC分类: