Invention Grant
- Patent Title: High-frequency device and manufacturing method thereof
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Application No.: US15844907Application Date: 2017-12-18
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Publication No.: US10707152B2Publication Date: 2020-07-07
- Inventor: Ming-Yen Weng , Ker-Yih Kao , Chia-Chi Ho , Tsutomu Shinozaki , Cheng-Chi Wang , I-Yin Li
- Applicant: InnoLux Corporation
- Applicant Address: TW Miao-Li County
- Assignee: INNOLUX CORPORATION
- Current Assignee: INNOLUX CORPORATION
- Current Assignee Address: TW Miao-Li County
- Agency: McClure, Qualey & Rodack, LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5a1f718f
- Main IPC: H01L23/66
- IPC: H01L23/66 ; H01L21/48 ; H01L23/485 ; H01L21/311 ; H01L25/065 ; H01Q1/38

Abstract:
A high-frequency device manufacturing method is provided. The method includes providing a substrate; forming a conductive material on the substrate; standing the substrate and the conductive material for a first time duration; forming a conductive layer by sequentially repeating the steps of forming the conductive material and standing at least once; and patterning the conductive layer. The thickness of the conductive layer is in a range from 0.9 μm to 10 μm. A high-frequency device is also provided.
Public/Granted literature
- US20180204785A1 HIGH-FREQUENCY DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2018-07-19
Information query
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