Invention Grant
- Patent Title: Semiconductor memory device having vertical supporter penetrating the gate stack structure and through dielectric pattern
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Application No.: US16193283Application Date: 2018-11-16
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Publication No.: US10707231B2Publication Date: 2020-07-07
- Inventor: Kyeong Jin Park , Seo-Goo Kang , Kwonsoon Jo , Kohji Kanamori
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Law, PLLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@2c20701d
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11573 ; H01L23/48 ; H01L27/11568 ; H01L23/528 ; H01L23/522 ; H01L29/10

Abstract:
Disclosed is a semiconductor memory device comprising a peripheral circuit structure on a first substrate, a second substrate on the peripheral circuit structure, a stack structure on the second substrate and comprising a plurality of gate electrodes, a through dielectric pattern penetrating the stack structure and the second substrate, and a vertical supporter on a top surface of the second substrate and vertically extending from the top surface of the second substrate and penetrating the stack structure and the through dielectric pattern.
Public/Granted literature
- US20190312051A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2019-10-10
Information query
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