Invention Grant
- Patent Title: Methods and processes for forming devices from correlated electron material (CEM)
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Application No.: US16200214Application Date: 2018-11-26
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Publication No.: US10707415B2Publication Date: 2020-07-07
- Inventor: Lucian Shifren , Kimberly Gay Reid , Gregory Munson Yeric , Manuj Rathor , Glen Arnold Rosendale
- Applicant: Arm Limited
- Applicant Address: GB Cambridge
- Assignee: Arm Limited
- Current Assignee: Arm Limited
- Current Assignee Address: GB Cambridge
- Agency: Berkeley Law & Technology Group, LLP
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L27/24 ; H01L25/00

Abstract:
Subject matter disclosed herein may relate to fabrication of correlated electron materials used, for example, to perform specified application performance parameters. In embodiments, CEM devices fabricated at a first stage of a wafer fabrication process, such as a front-end-of-line stage, may differ from CEM devices fabricated at a second stage of a wafer fabrication process, such as a middle-of-line stage or a back-end-of-line stage, for example.
Public/Granted literature
- US20190173008A1 METHODS AND PROCESSES FOR FORMING DEVICES FROM CORRELATED ELECTRON MATERIAL (CEM) Public/Granted day:2019-06-06
Information query
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