Invention Grant
- Patent Title: Shape metric based scoring of wafer locations
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Application No.: US16375851Application Date: 2019-04-04
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Publication No.: US10714366B2Publication Date: 2020-07-14
- Inventor: Saibal Banerjee , Jagdish Chandra Saraswatula
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corp.
- Current Assignee: KLA-Tencor Corp.
- Current Assignee Address: US CA Milpitas
- Agent Ann Marie Mewherter
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H01L21/67 ; G01N21/95 ; H01J37/22 ; G01N21/956 ; G06F30/398

Abstract:
Methods and systems for shape metric based scoring of wafer locations are provided. One method includes selecting shape based grouping (SBG) rules for at least two locations on a wafer. For one of the wafer locations, the selecting step includes modifying distances between geometric primitives in a design for the wafer with metrology data for the one location and determining metrical complexity (MC) scores for SBG rules associated with the geometric primitives in a field of view centered on the one location based on the distances. The selecting step also includes selecting one of the SBG rules for the one location based on the MC scores. The method also includes sorting the at least two locations on the wafer based on the SBG rule selected for the at least two locations.
Public/Granted literature
- US20190318949A1 SHAPE METRIC BASED SCORING OF WAFER LOCATIONS Public/Granted day:2019-10-17
Information query
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