- 专利标题: Logic elements comprising carbon nanotube field effect transistor (CNTFET) devices and methods of making same
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申请号: US16005011申请日: 2018-06-11
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公开(公告)号: US10714537B2公开(公告)日: 2020-07-14
- 发明人: Claude L. Bertin
- 申请人: Nantero, Inc.
- 申请人地址: US MA Woburn
- 专利权人: Nantero, Inc.
- 当前专利权人: Nantero, Inc.
- 当前专利权人地址: US MA Woburn
- 代理机构: Jones Day
- 主分类号: H01L27/28
- IPC分类号: H01L27/28 ; B82Y10/00 ; H01L51/00 ; H03K19/20 ; G06F30/30 ; H01L21/02 ; H01L29/16 ; H01L29/78 ; H01L51/10 ; H01L51/05 ; B82Y40/00
摘要:
Inverter circuits and NAND circuits comprising nanotube based FETs and methods of making the same are described. Such circuits can be fabricating using field effect transistors comprising a source, a drain, a channel region, and a gate, wherein the first channel region includes a fabric of semiconducting nanotubes of a given conductivity type. Such FETs can be arranged to provide inverter circuits in either two-dimension or three-dimensional (stacked) layouts. Design equations based upon consideration of the electrical characteristics of the nanotubes are described which permit optimization of circuit design layout based upon constants that are indicative of the current carrying capacity of the nanotube fabrics of different FETs.
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