- 专利标题: Impedance matching network and method
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申请号: US16843138申请日: 2020-04-08
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公开(公告)号: US10720309B1公开(公告)日: 2020-07-21
- 发明人: Tomislav Lozic , Bala Kandampalayam , Michael Ulrich , Imran Bhutta , Ronald Decker
- 申请人: Reno Technologies, Inc.
- 申请人地址: US DE Wilmington
- 专利权人: RENO TECHNOLOGIES, INC.
- 当前专利权人: RENO TECHNOLOGIES, INC.
- 当前专利权人地址: US DE Wilmington
- 代理机构: The Belles Group, P.C.
- 主分类号: H03H7/38
- IPC分类号: H03H7/38 ; H01J37/32 ; H01L21/311 ; H01L21/285 ; H01L21/3213 ; H01L21/02 ; H01L21/67 ; H03H7/40
摘要:
In one embodiment, the present disclosure is directed to a method for impedance matching. The RF source provides at least two repeating, non-zero pulse levels, including a high-priority pulse level and a low-priority pulse level. The matching network comprises at least one EVC, which comprises discrete capacitors configured to switch in and out to provide a plurality of match configurations. Each EVC has a switching limit comprising a predetermined number of switches in or out of the EVC's discrete capacitors in a prior time interval. Upon determining that switching to a new match configuration would cause an EVC to reach the switching limit, the method determines whether the new match configuration is for the low- or high-priority pulse level. If for the low-priority pulse level, the method prevents the switching of the EVC. If for the high-priority pulse level, the method switches the EVC to the new match configuration.
公开/授权文献
- US20200234927A1 IMPEDANCE MATCHING NETWORK AND METHOD 公开/授权日:2020-07-23
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