A method of making an adhesive article comprises three steps. First, a backing is provided having first and second opposed major surfaces with respective first and second silicone release layers disposed thereon. The second silicone release layer further comprises a compound represented by the formula: R1 represents a divalent hydrocarbon radical having from 2 to 40 carbon atoms or covalent bond. R2 represents a monovalent or divalent poly(dimethylsiloxane) moiety. X represents —NH— or a covalent bond. Rf represents a perfluorinated group having from 3 to 5 carbon atoms. y is 1 or 2. Second, an adhesive layer is disposed onto the first silicone release layer. Third, the adhesive layer is exposed to E-beam radiation within a process chamber containing oxygen to provide a crosslinked adhesive layer. An adhesive article made by the method and the compound are also disclosed.