Invention Grant
- Patent Title: Sulfoxide/glycol ether based solvents for use in the electronics industry
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Application No.: US15544310Application Date: 2017-01-20
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Publication No.: US10731114B2Publication Date: 2020-08-04
- Inventor: Qi Jiang , Xin Jiang , Hua Ren , Eungkyu Kim , Jianhai Mu , Kaoru Ohba
- Applicant: Dow Global Technologies LLC
- Applicant Address: US MI Midland
- Assignee: Dow Global Technologies LLC
- Current Assignee: Dow Global Technologies LLC
- Current Assignee Address: US MI Midland
- Agency: Quarles & Brady LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@70800457
- International Application: PCT/CN2017/071798 WO 20170120
- International Announcement: WO2018/058866 WO 20180405
- Main IPC: C11D7/32
- IPC: C11D7/32 ; C11D7/34 ; C11D7/26 ; C11D7/50 ; C11D11/00 ; G03F7/42 ; C11D3/43 ; C11D3/34 ; C11D3/36 ; C11D3/20 ; C11D3/32 ; C11D3/28

Abstract:
Solvents useful for removing, among other things, photoresists and poly(amic acid)/polyimide from display/semiconductor substrates or electronic processing equipment, consist essentially of: (A) a first component consisting of a sulfoxide, e.g., DMSO; (B) a second component consisting of a glycol ether, e.g., ethylene glycol monobutyl ether; and (C) a third component consisting of at least one of N-formyl morpholine, N,N-dimethyl propionamide, 3-methoxy-N,N-dimethyl propanamide, triethyl phosphate, N,N-dimethyl acetamide; N,N-diethyl acetamide, N,N-diethyl propionamide, N-methyl acetamide, N-methyl propionamide, N-ethyl acetamide, and N-ethyl propionamide.
Public/Granted literature
- US20190211286A1 Sulfoxide/Glycol Ether Based Solvents for Use in the Electronics Industry Public/Granted day:2019-07-11
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