Invention Grant
- Patent Title: LTPS thin film transistor and method for manufacturing the same, array substrate and method for manufacturing the same, and display device
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Application No.: US16036099Application Date: 2018-07-16
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Publication No.: US10741692B2Publication Date: 2020-08-11
- Inventor: Shengguang Ban , Zhanfeng Cao , Qi Yao , Dapeng Xue
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Brooks Kushman P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@61ea038
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/786 ; H01L27/12 ; H01L29/66 ; H01L21/027 ; H01L21/3205 ; G02F1/1362 ; G02F1/1368
Abstract:
The present disclosure provides a method for manufacturing an LTPS thin film transistor which includes: forming a light shielding pattern and an active layer of the LTPS thin film transistor on a base substrate through one single patterning process, in which an orthogonal projection of the active layer on the base substrate falls within an orthogonal projection of the light shielding pattern on the base substrate, and the light shielding pattern is made of a semiconductor material.
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