Invention Grant
- Patent Title: Laminating device and method for fabricating semiconductor package using the same
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Application No.: US15900284Application Date: 2018-02-20
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Publication No.: US10748855B2Publication Date: 2020-08-18
- Inventor: Tea-Geon Kim , Jung Lae Jung
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Samsung-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Law, PLLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@1afbe6e9
- Main IPC: H01L23/00
- IPC: H01L23/00 ; B32B37/22 ; H01L21/67 ; H01L21/48 ; B32B37/10 ; H01L21/66 ; H01L23/498

Abstract:
A method of fabricating a semiconductor package using a laminating device is provided. The method includes placing a substrate on a substrate stand; providing a pressurizing unit which is expandable and includes a convex surface facing an upper surface of the substrate stand, on the substrate stand; injecting air into the pressurizing unit using a plate which is connected to the pressurizing unit; and supplying a film by a film supply unit which supplies the film between the substrate stand and the pressurizing unit, wherein the pressurizing unit attaches the film onto the substrate, while expanding.
Public/Granted literature
- US20190051618A1 LAMINATING DEVICE AND METHOD FOR FABRICATING SEMICONDUCTOR PACKAGE USING THE SAME Public/Granted day:2019-02-14
Information query
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