发明授权
- 专利标题: Semiconductor device formed by oxide semiconductor and method for manufacturing same
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申请号: US16212599申请日: 2018-12-06
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公开(公告)号: US10748939B2公开(公告)日: 2020-08-18
- 发明人: Hideki Kitagawa , Tohru Daitoh , Hajime Imai , Hisao Ochi , Tetsuo Fujita , Tetsuo Kikuchi , Shingo Kawashima , Masahiko Suzuki
- 申请人: SHARP KABUSHIKI KAISHA
- 申请人地址: JP Sakai, Osaka
- 专利权人: SHARP KABUSHIKI KAISHA
- 当前专利权人: SHARP KABUSHIKI KAISHA
- 当前专利权人地址: JP Sakai, Osaka
- 代理机构: ScienBiziP, P.C.
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@594c1083
- 主分类号: H01L27/12
- IPC分类号: H01L27/12 ; G02F1/1343 ; H01L21/28 ; H01L21/283 ; H01L21/306 ; H01L23/532 ; H01L21/768 ; H01L29/417 ; H01L29/786 ; H01L23/544 ; H01L29/66 ; G02F1/1368
摘要:
A semiconductor device (100A) is provided with: a gate electrode (3); an oxide semiconductor layer (5); a thin-film transistor (101) including a gate insulating layer (4), a source electrode (7S), and a drain electrode (7D); an inter-layer insulating layer (11) arranged so as to cover the thin-film transistor (101) and come into contact with a channel area (5c) of the thin-film transistor (101); and a transparent electroconductive layer (19) arranged on the inter-layer insulating layer (11), the source electrode (7S) and the drain electrode (7D) each having a copper layer (7a), and the device being further provided with a copper oxide film (8) arranged between the source and drain electrodes and the inter-layer insulating layer (11). The inter-layer insulating layer (11) covers the drain electrode (7D) with the copper oxide film (8) interposed therebetween. The transparent electroconductive layer (19) is directly connected to the copper layer (7a) of the drain electrode (7D) inside a contact hole (CH1) formed in the inter-layer insulating layer (11), without the copper oxide film (8) being interposed therebetween.
公开/授权文献
- US20190109159A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME 公开/授权日:2019-04-11
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