Invention Grant
- Patent Title: Metal precursors with modified diazabutadiene ligands for CVD and ALD and methods of use
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Application No.: US15947695Application Date: 2018-04-06
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Publication No.: US10752649B2Publication Date: 2020-08-25
- Inventor: Jeffrey W. Anthis , Atashi Basu , David Thompson , Nasrin Kazem
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Servilla Whitney LLC
- Main IPC: C07F15/06
- IPC: C07F15/06 ; C23C16/455 ; C23C16/18

Abstract:
Metal coordination complexes comprising at least one diazabutadiene based ligand having a structure represented by: where R1 and R4 are selected from the group consisting of C4-C10 alkyl groups; and R2 and R3 are each independently selected from the group consisting of H, C1-C6 alkyl, cycloalkyl, or aryl groups and the difference in the number of carbons in R2 and R3 is greater than or equal to 2. Processing methods using the metal coordination complexes are also described.
Public/Granted literature
- US20180291052A1 METAL PRECURSORS WITH MODIFIED DIAZABUTADIENE LIGANDS FOR CVD AND ALD AND METHODS OF USE Public/Granted day:2018-10-11
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