Invention Grant
- Patent Title: Spacer with laminate liner
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Application No.: US16193313Application Date: 2018-11-16
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Publication No.: US10755918B2Publication Date: 2020-08-25
- Inventor: Man Gu , Tao Han , Charlotte D. Adams
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee: GLOBALFOUNDRIES, INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Francois Pagette; Andrew M. Calderon
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/02 ; H01L21/311

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to a spacer with laminate liner and methods of manufacture. The structure includes: a replacement metal gate structure; a laminate low-k liner on the replacement metal gate structure; and a spacer on the laminate low-k liner.
Public/Granted literature
- US20200161122A1 SPACER WITH LAMINATE LINER Public/Granted day:2020-05-21
Information query
IPC分类: