- 专利标题: Integrated circuit device and method of fabricating integrated circuit
-
申请号: US16244109申请日: 2019-01-10
-
公开(公告)号: US10756128B2公开(公告)日: 2020-08-25
- 发明人: Kuo-Chih Lai , Shih-Min Chou , Ko-Wei Lin , Chin-Fu Lin , Wei-Chuan Tsai , Chun-Yao Yang , Chia-Fu Cheng , Yi-Syun Chou , Wei Chen
- 申请人: UNITED MICROELECTRONICS CORP.
- 申请人地址: TW Hsin-Chu
- 专利权人: UNITED MICROELECTRONICS CORP.
- 当前专利权人: UNITED MICROELECTRONICS CORP.
- 当前专利权人地址: TW Hsin-Chu
- 代理商 Winston Hsu
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@6f44b046
- 主分类号: H01L27/14
- IPC分类号: H01L27/14 ; H01L27/146 ; H01L21/768 ; H01L49/02
摘要:
An integrated circuit device includes a complementary metal oxide semiconductor (CMOS) image sensor. The complementary metal oxide semiconductor (CMOS) image sensor includes a P-N junction photodiode, a transistor gate, a polysilicon plug and a stacked metal layer. The P-N junction photodiode is disposed in a substrate. The transistor gate and the polysilicon plug are disposed on the substrate, wherein the polysilicon plug is directly connected to the P-N junction photodiode. The stacked metal layer connects the polysilicon plug to the transistor gate, wherein the stacked metal layer includes a lower metal layer and an upper metal layer, and the lower metal layer includes a first metal silicide part contacting to the polysilicon plug. The present invention also provides a method of fabricating said integrated circuit device.
公开/授权文献
信息查询
IPC分类: