Invention Grant
- Patent Title: Spin orbit torque MRAM and manufacture thereof
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Application No.: US16290621Application Date: 2019-03-01
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Publication No.: US10756259B2Publication Date: 2020-08-25
- Inventor: Jaesoo Ahn , Chando Park , Hsin-wei Tseng , Lin Xue , Mahendra Pakala
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01L27/00
- IPC: H01L27/00 ; H01L43/00 ; H01L43/12 ; H01L43/02 ; H01L43/10 ; H01L27/22

Abstract:
The bottom-pinned spin-orbit torque (SOT) MRAM devices are fabricated to form high quality interfaces between layers including the spin-orbit torque (SOT) layer and the free layer of the magnetic tunnel junction (MTJ) by forming those layers under vacuum, without breaking vacuum in between formation of the layers. An encapsulation layer is used as an etch stop and to protect the free layer. The encapsulation layer is etched back prior to the deposition of a metal layer. The metal layer forms a plurality of metal lines that are electrically connected to two or more sides of the SOT layer and are electrically coupled to the SOT layer to transfer current through the SOT layer. The metal lines are not in contact with a top surface of the SOT layer which has a dielectric layer disposed thereon.
Public/Granted literature
- US20200161542A1 SPIN ORBIT TORQUE MRAM AND MANUFACTURE THEREOF Public/Granted day:2020-05-21
Information query
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