Invention Grant
- Patent Title: Inject insert for EPI chamber
-
Application No.: US14584441Application Date: 2014-12-29
-
Publication No.: US10760161B2Publication Date: 2020-09-01
- Inventor: Shu-Kwan Lau , Mehmet Tugrul Samir , Aaron Miller
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: C23C16/455
- IPC: C23C16/455 ; F16L41/02 ; C30B25/14 ; C30B31/16 ; H01J37/32 ; C30B25/16
Abstract:
Embodiments of the present invention provide a liner assembly including an inject insert. The inject insert enables tenability of flow parameters, such as velocity, density, direction and spatial location, across a substrate being processed. The processing gas across the substrate being processed may be specially tailored for individual processes with a liner assembly according to embodiment of the present invention.
Public/Granted literature
- US20160068956A1 INJECT INSERT FOR EPI CHAMBER Public/Granted day:2016-03-10
Information query
IPC分类:
