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公开(公告)号：US11060203B2
公开(公告)日：2021-07-13
申请号：US14826065
申请日：2015-08-13
Applicant: Applied Materials, Inc.
Inventor： Shu-Kwan Lau , Mehmet Tugrul Samir , Aaron Miller
IPC: C30B25/08 , C30B25/14 , C23C16/455 , C23C16/44 , C30B35/00
Abstract: Embodiments disclosed herein describe a liner assembly including a plurality of individually separated gas passages. The liner assembly provides control of flow parameters, such as velocity, density, direction and spatial location, across a substrate being processed. The processing gas across the substrate being processed may be specially tailored for individual processes with a liner assembly according to the present embodiments.
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公开(公告)号：US20160215392A1
公开(公告)日：2016-07-28
申请号：US15001710
申请日：2016-01-20
Applicant: Applied Materials, Inc.
Inventor： Joseph Yudovsky , Kevin Griffin , Aaron Miller , Jeff Tobin , Eran Newman , Tatsuya E. Sato , Patricia M. Liu
IPC: C23C16/455
Abstract: Apparatus and methods for spatial atomic layer deposition are disclosed. The apparatus include a gas delivery system comprising a first gas flowing through a plurality of legs in fluid communication with a valve and a second gas flowing through a plurality of legs into the valves.
Abstract translation: 公开了用于空间原子层沉积的装置和方法。 该装置包括气体输送系统，其包括流过与阀流体连通的多个支腿的第一气体和流过多个支柱的阀的第二气体。
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公开(公告)号：US10109514B2
公开(公告)日：2018-10-23
申请号：US15675825
申请日：2017-08-14
Applicant: Applied Materials, Inc.
Inventor： Kim Vellore , Dinesh Kanawade , Stephen Moffatt , Aaron Miller , Leonid M. Tertitski , Norman L. Tam , Michael Liu , Colin Fox
Abstract: Embodiments of the present disclosure generally relate to methods and apparatus for visual lamp failure detection in a processing chamber, such as an RTP chamber. Visual feedback is facilitated through the use of a wide-angle lens positioned to view lamps within the process chamber. The wide-angle lens is positioned within a probe and secured using a spring in order to withstand high temperature processing. A camera coupled to the lens is adapted to capture an image of the lamps within the process chamber. The captured image of the lamps is then compared to a reference image to determine if the lamps are functioning as desired.
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公开(公告)号：USD794753S1
公开(公告)日：2017-08-15
申请号：US29560672
申请日：2016-04-08
Applicant: Applied Materials, Inc.
Designer： Aaron Miller
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公开(公告)号：USD790039S1
公开(公告)日：2017-06-20
申请号：US29560680
申请日：2016-04-08
Applicant: Applied Materials, Inc.
Designer： Lara Hawrylchak , Kong Lung Samuel Chan , Aaron Miller
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Patent Agency Ranking
公开(公告)号：US20200255943A1
公开(公告)日：2020-08-13
申请号：US16860458
申请日：2020-04-28
Applicant: Applied Materials, Inc.
Inventor： Aaron Miller , Kallol Bera
IPC: C23C16/455
Abstract: Apparatus and methods for processing a substrate including an injector unit insert with a plurality of flow paths leading to a first plenum, each of the flow paths providing one or more of substantially the same residence time, length and/or conductance. Injector units including the injector unit inserts have increased flow uniformity.
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公开(公告)号：US10271383B2
公开(公告)日：2019-04-23
申请号：US15281715
申请日：2016-09-30
Applicant: Applied Materials, Inc.
Inventor： Joseph M. Ranish , Aaron Miller , Oleg V. Serebryanov
Abstract: Implementations of the present disclosure provide an adapter for use in a processing chamber. In one implementation, the adapter comprises a hollow body having a first end and a second end opposing the first end, a first block and a second block symmetrically disposed within the hollow body about a longitudinal axis of the body, wherein the first block and the second block define a central opening therebetween, and a retention device disposed in contact with the first and second blocks to confine the movement of the first and second blocks with respect to the hollow body. The central opening is sized so that the first block and the second block provide direct contact with a press seal of the lamp.
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公开(公告)号：US11198939B2
公开(公告)日：2021-12-14
申请号：US16860458
申请日：2020-04-28
Applicant: Applied Materials, Inc.
Inventor： Aaron Miller , Kallol Bera
IPC: C23C16/455 , H01L21/67 , H01J37/32
Abstract: Apparatus and methods for processing a substrate including an injector unit insert with a plurality of flow paths leading to a first plenum, each of the flow paths providing one or more of substantially the same residence time, length and/or conductance. Injector units including the injector unit inserts have increased flow uniformity.
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公开(公告)号：US10820379B2
公开(公告)日：2020-10-27
申请号：US16390862
申请日：2019-04-22
Applicant: Applied Materials, Inc.
Inventor： Joseph M. Ranish , Aaron Miller , Oleg V. Serebryanov
Abstract: Implementations of the present disclosure provide an adapter for use in a processing chamber. In one implementation, the adapter comprises a hollow body having a first end and a second end opposing the first end, a first block and a second block symmetrically disposed within the hollow body about a longitudinal axis of the body, wherein the first block and the second block define a central opening therebetween, and a retention device disposed in contact with the first and second blocks to confine the movement of the first and second blocks with respect to the hollow body. The central opening is sized so that the first block and the second block provide direct contact with a press seal of the lamp.
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公开(公告)号：US10760161B2
公开(公告)日：2020-09-01
申请号：US14584441
申请日：2014-12-29
Applicant: Applied Materials, Inc.
Inventor： Shu-Kwan Lau , Mehmet Tugrul Samir , Aaron Miller
Abstract: Embodiments of the present invention provide a liner assembly including an inject insert. The inject insert enables tenability of flow parameters, such as velocity, density, direction and spatial location, across a substrate being processed. The processing gas across the substrate being processed may be specially tailored for individual processes with a liner assembly according to embodiment of the present invention.
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