Invention Grant
- Patent Title: Dual-column-parallel CCD sensor and inspection systems using a sensor
-
Application No.: US16397072Application Date: 2019-04-29
-
Publication No.: US10764527B2Publication Date: 2020-09-01
- Inventor: Yung-Ho Alex Chuang , Jingjing Zhang , Sharon Zamek , John Fielden , Devis Contarato , David L. Brown
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Bever, Hoffman & Harms, LLP
- Main IPC: H01L27/148
- IPC: H01L27/148 ; H04N5/378 ; H04N5/361 ; G01N21/956 ; G01N21/95 ; G06T7/00 ; H04N5/372

Abstract:
A dual-column-parallel image CCD sensor utilizes a dual-column-parallel readout circuit including two pairs of cross-connected transfer gates to alternately transfer pixel data (charges) from a pair of adjacent pixel columns to a shared output circuit at high speed with low noise. Charges transferred along the two adjacent pixel columns at a line clock rate are alternately passed by the transfer gates to a summing gate that is operated at twice the line clock rate to pass the image charges to the shared output circuit. A symmetrical Y-shaped diffusion is utilized in one embodiment to merge the image charges from the two pixel columns. A method of driving the dual-column-parallel CCD sensor with line clock synchronization is also described. A method of inspecting a sample using the dual-column-parallel CCD sensor is also described.
Public/Granted literature
- US20190253652A1 Dual-Column-Parallel CCD Sensor And Inspection Systems Using A Sensor Public/Granted day:2019-08-15
Information query
IPC分类: