Invention Grant
- Patent Title: Manufacture parameters grouping and analyzing method, and manufacture parameters grouping and analyzing system
-
Application No.: US15820662Application Date: 2017-11-22
-
Publication No.: US10776402B2Publication Date: 2020-09-15
- Inventor: Li-Chin Wang , Ya-Ching Cheng , Chien-Hung Chen , Chun-Liang Hou , Da-Ching Liao
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsinchu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsinchu
- Agency: WPAT, PC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5fcd281c
- Main IPC: G06F17/00
- IPC: G06F17/00 ; G06F16/28 ; G05B19/418

Abstract:
A manufacture parameters grouping and analyzing method, and a manufacture parameters grouping and analyzing system are provided. The manufacture parameters grouping and analyzing method includes the following steps: A plurality of process factors are classified into a plurality of groups. In each of the groups, an intervening relationship between any two of the process factors is larger than a predetermined correlation value. In each of the groups, at least one representative factor is selected from each of the groups according to a plurality of outputting relationships of the process factors related to an output factor or a plurality of sample amounts of the process factors. Finally, the representative factor is used for various applications.
Public/Granted literature
Information query