Invention Grant
- Patent Title: Orientation engineering in complementary metal oxide semiconductor fin field effect transistor integration for increased mobility and sharper junction
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Application No.: US16672994Application Date: 2019-11-04
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Publication No.: US10777557B2Publication Date: 2020-09-15
- Inventor: Chia-Yu Chen , Bruce B. Doris , Hong He , Rajasekhar Venigalla
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L29/66 ; H01L29/78 ; H01L29/04 ; H01L21/84 ; H01L21/8238 ; H01L27/12 ; H01L21/18 ; H01L29/165

Abstract:
A semiconductor device that includes at least one germanium containing fin structure having a length along a direction and a sidewall orientated along the (100) plane. The semiconductor device also includes at least one germanium free fin structure having a length along a direction and a sidewall orientated along the (100) plane. A gate structure is present on a channel region of each of the germanium containing fin structure and the germanium free fin structure. N-type epitaxial semiconductor material having a square geometry present on the source and drain portions of the sidewalls having the (100) plane orientation of the germanium free fin structures. P-type epitaxial semiconductor material having a square geometry is present on the source and drain portions of the sidewalls having the (100) plane orientation of the germanium containing fin structures.
Public/Granted literature
Information query
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