Invention Grant
- Patent Title: Integrating silicon-BJT to a silicon-germanium-HBT manufacturing process
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Application No.: US16120098Application Date: 2018-08-31
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Publication No.: US10784257B2Publication Date: 2020-09-22
- Inventor: Petrus Hubertus Cornelis Magnee , Pieter Simon van Dijk , Johannes Josephus Theodorus Marinus Donkers , Dolphin Abessolo Bidzo
- Applicant: NXP B.V.
- Applicant Address: NL Eindhoven
- Assignee: NXP B.V.
- Current Assignee: NXP B.V.
- Current Assignee Address: NL Eindhoven
- Main IPC: H01L27/082
- IPC: H01L27/082 ; H01L21/02 ; H01L21/225 ; H01L21/266 ; H01L21/306 ; H01L21/324 ; H01L21/8222 ; H01L21/8249 ; H01L27/02 ; H01L27/06 ; H01L29/04 ; H01L29/165 ; H01L29/66 ; H01L29/732 ; H01L29/737

Abstract:
This specification discloses methods for integrating a SiGe-based HBT (heterojunction bipolar transistor) and a Si-based BJT (bipolar junction transistor) together in a single manufacturing process that does not add a lot of process complexity, and an integrated circuit that can be fabricated utilizing such a streamlined manufacturing process. In some embodiments, such an integrated circuit can enjoy both the benefits of a higher RF (radio frequency) performance for the SiGe HBT and a lower leakage current for the Si-based BJT. In some embodiments, such an integrated circuit can be applied to an ESD (electrostatic discharge) clamp circuit, in order to achieve a lower, or no, yield-loss.
Public/Granted literature
- US20200075585A1 INTEGRATING SILICON-BJT TO A SILICON-GERMANIUM-HBT MANUFACTURING PROCESS Public/Granted day:2020-03-05
Information query
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