Invention Grant
- Patent Title: Method to achieve a uniform Group IV material layer in an aspect ratio trapping trench
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Application No.: US15779442Application Date: 2015-12-26
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Publication No.: US10784352B2Publication Date: 2020-09-22
- Inventor: Sanaz K. Gardner , Willy Rachmady , Van H. Le , Matthew V. Metz , Seiyon Kim , Ashish Agrawal , Jack T. Kavalieros
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- International Application: PCT/US2015/000503 WO 20151226
- International Announcement: WO2017/111873 WO 20170629
- Main IPC: H01L29/267
- IPC: H01L29/267 ; H01L29/78 ; H01L27/088 ; H01L21/762 ; H01L21/768 ; H01L29/10 ; H01L29/66

Abstract:
Related fields of the present disclosure are in the field of transistor devices, and in particular, FinFET device structures formed using aspect ratio trapping trench (ART) process techniques. For example, a FinFET device consistent with the present disclosure comprises a first fin structure including a first upper fin portion atop a first lower fin portion and a second fin structure including a second upper fin portion atop a second lower fin portion. The first and second upper fin structures include a Group IV material and the first and second lower fin structures include a Group III-V material.
Public/Granted literature
- US20180261498A1 A METHOD TO ACHIEVE A UNIFORM GROUP IV MATERIAL LAYER IN AN ASPECT RATIO TRAPPING TRENCH Public/Granted day:2018-09-13
Information query
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