Invention Grant
- Patent Title: Alloys of Co to reduce stress
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Application No.: US15674156Application Date: 2017-08-10
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Publication No.: US10793947B2Publication Date: 2020-10-06
- Inventor: Philip S. H. Chen , Bryan C. Hendrix , Thomas H. Baum
- Applicant: Entegris, Inc.
- Applicant Address: US MA Billerica
- Assignee: ENTEGRIS, INC.
- Current Assignee: ENTEGRIS, INC.
- Current Assignee Address: US MA Billerica
- Agency: Entegris, Inc.
- Main IPC: C23C16/16
- IPC: C23C16/16 ; C23C16/30 ; C23C16/02 ; C23C16/18 ; C07F15/06 ; B32B15/04 ; C22C19/07 ; H01L21/768

Abstract:
A deposited cobalt composition is described, including cobalt and one or more alloy component that is effective in combination with cobalt to enhance adhesion to a substrate when exposed on the substrate to variable temperature and/or delaminative force conditions, as compared to corresponding elemental cobalt, wherein the one or more alloy component is selected from the group consisting of boron, phosphorous, tin, antimony, indium, and gold. Such deposited cobalt composition may be employed for metallization in semiconductor devices and device precursor structures, flat-panel displays, and solar panels, and provides highly adherent metallization when the metallized substrate is subjected to thermal cycling and/or chemical mechanical planarization operations in the manufacturing of the semiconductor, flat-panel display, or solar panel product.
Public/Granted literature
- US20180044788A1 ALLOYS OF Co TO REDUCE STRESS Public/Granted day:2018-02-15
Information query
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