Invention Grant
- Patent Title: Visualization of three-dimensional semiconductor structures
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Application No.: US16283690Application Date: 2019-02-22
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Publication No.: US10794839B2Publication Date: 2020-10-06
- Inventor: Aaron J. Rosenberg , Jonathan Iloreta , Thaddeus G. Dziura , Antonio Gellineau , Yin Xu , Kaiwen Xu , John Hench , Abhi Gunde , Andrei Veldman , Liequan Lee , Houssam Chouaib
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA Corporation
- Current Assignee: KLA Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Huse IP Law
- Agent Charles C. Huse
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N21/95 ; H01L27/02 ; H01L27/088 ; H01L27/108 ; G06T17/10 ; G06T15/20 ; G01N21/956 ; H01L27/115 ; G06F30/39

Abstract:
A semiconductor metrology tool inspects an area of a semiconductor wafer. The inspected area includes a plurality of instances of a 3D semiconductor structure arranged periodically in at least one dimension. A computer system generates a model of a respective instance of the 3D semiconductor structure based on measurements collected during the inspection. The computer system renders an image of the model that shows a 3D shape of the model and provides the image to a device for display.
Public/Granted literature
- US20200271595A1 Visualization of Three-Dimensional Semiconductor Structures Public/Granted day:2020-08-27
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