Invention Grant
- Patent Title: Structure and formation method of chip package with lid
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Application No.: US16200838Application Date: 2018-11-27
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Publication No.: US10797006B2Publication Date: 2020-10-06
- Inventor: Shu-Shen Yeh , Chin-Hua Wang , Kuang-Chun Lee , Po-Yao Lin , Shyue-Ter Leu , Shin-Puu Jeng
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L23/367 ; H01L23/04 ; H01L23/10 ; H01L23/498

Abstract:
Structures and formation methods of a chip package are provided. The chip package includes a substrate and a semiconductor die over the substrate. The chip package also includes a lid covering a top surface of the semiconductor die. The lid has multiple support structures, and the support structures are positioned at respective corner portions of the substrate. Multiple openings penetrate through the lid to expose a space containing the semiconductor die.
Public/Granted literature
- US20190096826A1 STRUCTURE AND FORMATION METHOD OF CHIP PACKAGE WITH LID Public/Granted day:2019-03-28
Information query
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