Invention Grant
- Patent Title: Method of controlling a temperature of a chemical mechanical polishing process, temperature control, and CMP apparatus including the temperature control
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Application No.: US15926244Application Date: 2018-03-20
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Publication No.: US10821572B2Publication Date: 2020-11-03
- Inventor: Suk-Hoon Jeong , Sang-Hak Lee , Geun-Kyu Choi , Chang-Sun Hwang , Tae-Young Kwon , Young-Sang Kim , Hyung-Kyu Jin , Jeong-Nam Han
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Lee IP Law, P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@203c2698
- Main IPC: B24B37/00
- IPC: B24B37/00 ; B24B37/015 ; B24B55/02 ; B24B49/14 ; B24B37/26

Abstract:
A method of controlling a chemical mechanical polishing (CMP) process, a temperature control, and a CMP apparatus, the method including measuring actual temperatures of at least two regions in a platen in real time during the CMP process in which a polishing pad attached to the platen polishes a substrate held by a polishing head using slurry and deionized water; receiving the measured actual temperatures of the regions; and individually controlling the actual temperatures of the regions in real time during the CMP process to provide the regions with a predetermined set CMP process temperature.
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