Invention Grant
- Patent Title: Panel for flexible digital x-ray detector and method for manufacturing the same
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Application No.: US16211107Application Date: 2018-12-05
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Publication No.: US10852447B2Publication Date: 2020-12-01
- Inventor: Jinpil Kim , Minseok Yun
- Applicant: LG Display Co., Ltd.
- Applicant Address: KR Seoul
- Assignee: LG Display Co., Ltd.
- Current Assignee: LG Display Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: Fenwick & West LLP
- Priority: KR10-2017-0170777 20171212
- Main IPC: G01T1/20
- IPC: G01T1/20 ; H01L27/146 ; G01T1/202 ; H01L31/0392 ; H01L31/18 ; H01L31/115

Abstract:
A panel for a flexible digital X-ray detector and a method for manufacturing the same are disclosed. Embodiments of the flexible digital X-ray detector reduce device characteristic deterioration caused by X-ray exposure, increase flexibility to the panel by reducing a thickness of the panel yet provide rigidity to maintain the shape of the panel, and reduce residual impurities during a Laser Lift Off (LLO) process. The panel can include a multi-buffer layer in which a silicon oxide (SiOx) layer and a silicon nitride (SiNx) layer are alternately stacked, and a device array layer and a scintillator layer that are disposed over the multi-buffer layer. During the LLO process, the method for manufacturing the panel includes increasing the hydrogen content using a sacrificial layer including an amorphous silicon (a-Si) layer and a silicon nitride (SiNx) layer disposed at both surfaces of the a-Si layer, such that the amount of residual impurities in the sacrificial layer can be reduced.
Public/Granted literature
- US20190179039A1 Panel for Flexible Digital X-Ray Detector and Method for Manufacturing the Same Public/Granted day:2019-06-13
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