公开(公告)号：US10852447B2

公开(公告)日：2020-12-01

申请号：US16211107

申请日：2018-12-05

Applicant: LG Display Co., Ltd.

Inventor： Jinpil Kim ,  Minseok Yun

IPC: G01T1/20 ,  H01L27/146 ,  G01T1/202 ,  H01L31/0392 ,  H01L31/18 ,  H01L31/115

Abstract: A panel for a flexible digital X-ray detector and a method for manufacturing the same are disclosed. Embodiments of the flexible digital X-ray detector reduce device characteristic deterioration caused by X-ray exposure, increase flexibility to the panel by reducing a thickness of the panel yet provide rigidity to maintain the shape of the panel, and reduce residual impurities during a Laser Lift Off (LLO) process. The panel can include a multi-buffer layer in which a silicon oxide (SiOx) layer and a silicon nitride (SiNx) layer are alternately stacked, and a device array layer and a scintillator layer that are disposed over the multi-buffer layer. During the LLO process, the method for manufacturing the panel includes increasing the hydrogen content using a sacrificial layer including an amorphous silicon (a-Si) layer and a silicon nitride (SiNx) layer disposed at both surfaces of the a-Si layer, such that the amount of residual impurities in the sacrificial layer can be reduced.

公开(公告)号：US11199635B2

公开(公告)日：2021-12-14

申请号：US16886127

申请日：2020-05-28

Applicant: LG DISPLAY CO., LTD.

Inventor： Hyungil Na ,  Minseok Yun ,  Sangmo Byun

IPC: H01L27/146 ,  G01T1/20 ,  G01N23/04 ,  A61B6/00

Abstract: A digital X-ray detector, a digital X-ray detection device and a manufacturing method thereof are discussed. The digital X-ray detector includes a base substrate including an active region including a plurality of pixel regions, and a gate-in-panel (GIP) region as at least one side region to the active region; a PIN diode disposed in the active region and over the base substrate; a GIP driver disposed in the GIP region and over the base substrate; and a scintillator layer disposed over the PIN diode and the GIP driver so as to overlay the active region and at least a portion of the GIP region. In the present invention, damage of the driver due to X-ray is minimized while a bezel size is minimized.