Invention Grant
- Patent Title: Multi-beam particle beam system
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Application No.: US16277572Application Date: 2019-02-15
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Publication No.: US10854423B2Publication Date: 2020-12-01
- Inventor: Yanko Sarov , Jan Horn , Ulrich Bihr , Christof Riedesel , Erik Essers
- Applicant: Carl Zeiss MultiSEM GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss MultiSEM GmbH
- Current Assignee: Carl Zeiss MultiSEM GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Priority: DE102018202421 20180216
- Main IPC: H01J37/317
- IPC: H01J37/317 ; H01J37/04 ; H01J37/24 ; H01J37/10

Abstract:
A multi-beam particle beam system includes a multi-aperture plate having a multiplicity of apertures. During operation, one particle beam of the plurality of particle beams passes through each of the apertures. A multiplicity of electrodes are insulated from the second multi-aperture plate to influence the particle beam passing through the aperture. A voltage supply system for the electrodes includes: a signal a generator to generate a serial sequence of digital signals; a D/A converter to convert the digital signals into a sequence of voltages between an output of the D/A converter and the multi-aperture plate; and a controllable changeover system, which feeds the sequence of voltages successively to different electrodes.
Public/Granted literature
- US20190259575A1 MULTI-BEAM PARTICLE BEAM SYSTEM Public/Granted day:2019-08-22
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