公开(公告)号：US20210066037A1

公开(公告)日：2021-03-04

申请号：US17098965

申请日：2020-11-16

Applicant: Carl Zeiss MultiSEM GmbH

Inventor： Yanko Sarov ,  Jan Horn ,  Ulrich Bihr ,  Christof Riedesel ,  Erik Essers

IPC: H01J37/317 ,  H01J37/24 ,  H01J37/10 ,  H01J37/04

Abstract: A multi-beam particle beam system includes a multi-aperture plate having a multiplicity of apertures. During operation, one particle beam of the plurality of particle beams passes through each of the apertures. A multiplicity of electrodes are insulated from the second multi-aperture plate to influence the particle beam passing through the aperture. A voltage supply system for the electrodes includes: a signal a generator to generate a serial sequence of digital signals; a D/A converter to convert the digital signals into a sequence of voltages between an output of the D/A converter and the multi-aperture plate; and a controllable changeover system, which feeds the sequence of voltages successively to different electrodes.

公开(公告)号：US10854423B2

公开(公告)日：2020-12-01

申请号：US16277572

申请日：2019-02-15

Applicant: Carl Zeiss MultiSEM GmbH

Inventor： Yanko Sarov ,  Jan Horn ,  Ulrich Bihr ,  Christof Riedesel ,  Erik Essers

IPC: H01J37/317 ,  H01J37/04 ,  H01J37/24 ,  H01J37/10

Abstract: A multi-beam particle beam system includes a multi-aperture plate having a multiplicity of apertures. During operation, one particle beam of the plurality of particle beams passes through each of the apertures. A multiplicity of electrodes are insulated from the second multi-aperture plate to influence the particle beam passing through the aperture. A voltage supply system for the electrodes includes: a signal a generator to generate a serial sequence of digital signals; a D/A converter to convert the digital signals into a sequence of voltages between an output of the D/A converter and the multi-aperture plate; and a controllable changeover system, which feeds the sequence of voltages successively to different electrodes.

公开(公告)号：US20220277927A1

公开(公告)日：2022-09-01

申请号：US17663323

申请日：2022-05-13

Applicant: Carl Zeiss MultiSEM GmbH

Inventor： Stefan Schubert ,  Dieter Schumacher ,  Erik Essers ,  Ingo Mueller ,  Arne Thoma ,  Joerg Jacobi ,  Wilhelm Bolsinger ,  Dirk Zeidler

IPC: H01J37/28 ,  H01J37/317 ,  H01J37/147 ,  H01J37/04 ,  H01J37/244

Abstract: A particle beam system, such as a multi-beam particle microscope, includes a multi-beam deflection device and a beam stop. The multi-beam deflection device is arranged in the particle-optical beam path downstream of the multi-beam generator and upstream of the beam switch of the particle beam system. The multi-beam deflection device serves collectively blanks a multiplicity of charged individual particle beams. These impinge on a beam stop, which is arranged in the particle-optical beam path level with a site at which a particle beam diameter is reduced or is at a minimum. By way of example, such sites are the cross-over plane of the individual particle beams or an intermediate image plane. Associated methods for operating the particle beam system and associated computer program products are disclosed.

公开(公告)号：US11239054B2

公开(公告)日：2022-02-01

申请号：US17098965

申请日：2020-11-16

Applicant: Carl Zeiss MultiSEM GmbH

Inventor： Yanko Sarov ,  Jan Horn ,  Ulrich Bihr ,  Christof Riedesel ,  Erik Essers

IPC: H01J37/317 ,  H01J37/04 ,  H01J37/24 ,  H01J37/10

Abstract: A multi-beam particle beam system includes a multi-aperture plate having a multiplicity of apertures. During operation, one particle beam of the plurality of particle beams passes through each of the apertures. A multiplicity of electrodes are insulated from the second multi-aperture plate to influence the particle beam passing through the aperture. A voltage supply system for the electrodes includes: a signal a generator to generate a serial sequence of digital signals; a D/A converter to convert the digital signals into a sequence of voltages between an output of the D/A converter and the multi-aperture plate; and a controllable changeover system, which feeds the sequence of voltages successively to different electrodes.