Invention Grant
- Patent Title: Vertical memory devices and methods of manufacturing the same
-
Application No.: US16886021Application Date: 2020-05-28
-
Publication No.: US10854622B2Publication Date: 2020-12-01
- Inventor: Young-Bae Yoon , Joong-Shik Shin , Kwang-Ho Kim , Hyun-Mog Park
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2016-0043335 20160408
- Main IPC: H01L27/11565
- IPC: H01L27/11565 ; H01L27/11582 ; H01L27/11578 ; H01L27/11568 ; H01L27/11575

Abstract:
A vertical memory device includes a channel, gate lines, and a cutting pattern, respectively, on a substrate. The channel extends in a first direction substantially perpendicular to an upper surface of the substrate. The gate lines are spaced apart from each other in the first direction. Each of the gate lines surrounds the channel and extends in a second direction substantially parallel to the upper surface of the substrate. The cutting pattern includes a first cutting portion extending in the first direction and cutting the gate lines, and a second cutting portion crossing the first cutting portion and merged with the first cutting portion.
Public/Granted literature
- US20200295023A1 VERTICAL MEMORY DEVICES AND METHODS OF MANUFACTURING THE SAME Public/Granted day:2020-09-17
Information query
IPC分类: