Invention Grant
- Patent Title: NAND memory arrays, devices comprising semiconductor channel material and nitrogen, and methods of forming NAND memory arrays
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Application No.: US16412710Application Date: 2019-05-15
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Publication No.: US10854747B2Publication Date: 2020-12-01
- Inventor: Chris M. Carlson , Hung-Wei Liu , Jie Li , Dimitrios Pavlopoulos
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L29/16
- IPC: H01L29/16 ; H01L29/20 ; H01L29/10 ; H01L21/321 ; H01L29/78 ; H01L27/11524 ; H01L27/11556 ; H01L27/1157 ; H01L27/11582 ; H01L21/02 ; H01L29/788 ; H01L29/792

Abstract:
Some embodiments include device having a gate spaced from semiconductor channel material by a dielectric region, and having nitrogen-containing material directly against the semiconductor channel material and on an opposing side of the semiconductor channel material from the dielectric region. Some embodiments include a device having a gate spaced from semiconductor channel material by a dielectric region, and having nitrogen within at least some of the semiconductor channel material. Some embodiments include a NAND memory array which includes a vertical stack of alternating insulative levels and wordline levels. Channel material extends vertically along the stack. Charge-storage material is between the channel material and the wordline levels. Dielectric material is between the channel material and the charge-storage material. Nitrogen is within the channel material. Some embodiments include methods of forming NAND memory arrays.
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