- 专利标题: Microchip-type optical measuring apparatus and optical position adjusting method thereof
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申请号: US16237039申请日: 2018-12-31
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公开(公告)号: US10859996B2公开(公告)日: 2020-12-08
- 发明人: Yosuke Muraki , Fumitaka Otsuka
- 申请人: Sony Corporation
- 申请人地址: JP Tokyo
- 专利权人: Sony Corporation
- 当前专利权人: Sony Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Wolf, Greenfield & Sacks, P.C.
- 优先权: JP2012-080472 20120330
- 主分类号: G01N15/14
- IPC分类号: G01N15/14 ; G06N7/00 ; G05B19/27
摘要:
To provide a microchip-type optical measuring apparatus which is able to automatically perform position adjustment of a microchip with respect to an optical axis of laser with high accuracy.A microchip-type optical measuring apparatus includes an irradiation detection unit which detects light generated by irradiating a microchip with laser, a position adjustment unit which changes a relative position of the microchip with respect to the irradiation detection unit, and a control unit which outputs a movement signal for a position in which an integrated value or an average value of a detected intensity of the light in a preset region becomes high to the position adjustment unit.
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