Invention Grant
- Patent Title: Mask frame assembly including pattern position adjusting mechanism and pattern position adjusting method using the mask frame assembly
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Application No.: US15632453Application Date: 2017-06-26
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Publication No.: US10883164B2Publication Date: 2021-01-05
- Inventor: Mingoo Kang , Jongbum Kim
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: Cantor Colburn LLP
- Priority: KR10-2016-0091435 20160719
- Main IPC: C23C14/04
- IPC: C23C14/04 ; H01L51/00 ; H05K3/14 ; C23C16/04

Abstract:
A mask frame assembly includes: a mask including a deposition pattern through which a deposition material is deposited to a deposition target; a frame to which the mask comprising the deposition pattern is combined; and a pattern position adjusting mechanism which is coupled to the frame and configured to apply a force to the frame such that a position of the deposition pattern of the mask combined to the frame is changed.
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Information query
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