- 专利标题: Fabrication of optical metasurfaces
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申请号: US16841413申请日: 2020-04-06
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公开(公告)号: US10886317B2公开(公告)日: 2021-01-05
- 发明人: Gleb M. Akselrod , Erik E. Josberger , Mark C. Weidman
- 申请人: Elwha LLC
- 申请人地址: US WA Bellevue
- 专利权人: Elwha LLC
- 当前专利权人: Elwha LLC
- 当前专利权人地址: US WA Bellevue
- 主分类号: H01L27/146
- IPC分类号: H01L27/146 ; G02B5/18 ; G03H1/04 ; H04N5/225 ; H04N5/374 ; B29D11/00 ; B82Y20/00 ; G03H1/02 ; H01Q1/38 ; H01Q3/44 ; H01Q15/00 ; H01Q15/02 ; H01Q15/14 ; G01S7/481 ; G01S17/10 ; G01S17/42 ; G01S17/89 ; G02F1/01 ; G02F1/1339 ; G02F1/1341 ; H01J37/317 ; H01J37/32 ; G03H1/00 ; G02F1/29 ; G02F1/1334 ; G03F7/20
摘要:
The method is provided for fabricating an optical metasurface. The method may include depositing a conductive layer over a holographic region of a wafer and depositing a dielectric layer over the conducting layer. The method may also include patterning a hard mask on the dielectric layer. The method may further include etching the dielectric layer to form a plurality of dielectric pillars with a plurality of nano-scale gaps between the pillars.
公开/授权文献
- US20200303443A1 FABRICATION OF OPTICAL METASURFACES 公开/授权日:2020-09-24
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