Invention Grant
- Patent Title: Stable heater rebuild inspection and maintenance platform
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Application No.: US16046983Application Date: 2018-07-26
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Publication No.: US10892175B2Publication Date: 2021-01-12
- Inventor: Rodolfo Martinez , Robert Bell , Robert Stebbins
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Renaissance IP Law Group LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/687 ; F16M11/16 ; H05B6/10 ; F16M11/42

Abstract:
A stand for a heater pedestal with a base member and a support member detachably coupled to the base member, the support member having a plurality of ring members and at least one spacer member extending vertically from the base member, a ring member separated from another ring member by a spacer member, a ring member having an aperture which extends through the ring member in a horizontal direction, the at least one spacer member forming at least one opening between two corresponding ring members, and the ring member furthest from the base member configured to support a heater pedestal, and the apertures of the ring members of the support member being configured to receive a susceptor of the heater pedestal.
Public/Granted literature
- US20200035520A1 STABLE HEATER REBUILD INSPECTION AND MAINTENANCE PLATFORM Public/Granted day:2020-01-30
Information query
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