- 专利标题: Channel orientation of CMOS gate-all-around field-effect transistor devices for enhanced carrier mobility
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申请号: US16431866申请日: 2019-06-05
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公开(公告)号: US10892331B2公开(公告)日: 2021-01-12
- 发明人: Tenko Yamashita , Myung-Hee Na
- 申请人: International Business Machines Corporation
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Ryan, Mason & Lewis, LLP
- 代理商 Robert Sullivan
- 主分类号: H01L29/423
- IPC分类号: H01L29/423 ; H01L29/78 ; H01L29/10 ; H01L21/84 ; H01L29/06 ; H01L29/775 ; H01L21/8238 ; H01L29/66
摘要:
Techniques are provided to fabricate semiconductor integrated circuit devices which include complementary metal-oxide-semiconductor gate-all-around field-effect transistor devices (e.g., nanosheet field-effect transistor devices), wherein the channel orientation layout of N-type and P-type field-effect transistor devices are independently configured to provide enhanced carrier mobility in the channel layers of the different type field-effect transistor devices.
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