Invention Grant
- Patent Title: Stacked-die bulk acoustic wave oscillator package
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Application No.: US16747679Application Date: 2020-01-21
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Publication No.: US10892712B2Publication Date: 2021-01-12
- Inventor: Ricky A. Jackson , Kurt Peter Wachtler
- Applicant: TEXAS INSTRUMENTS INCORPORATED
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Ronald O. Neerings; Charles A. Brill; Frank D. Cimino
- Main IPC: H03B5/32
- IPC: H03B5/32 ; H03H9/17 ; H01L41/25 ; H03H9/05 ; H01L23/00 ; H01L41/047 ; H01L23/495 ; H01L41/053 ; H01L23/31 ; H01L25/16 ; H01L21/78 ; H01L21/56

Abstract:
A stacked-die oscillator package includes an oscillator circuit die having inner bond pads, and outer bond pads, and a bulk acoustic wave (BAW) resonator die having a piezoelectric transducer with a first and second BAW bond pad on a same side coupled to a top and bottom electrode layer across a piezoelectric layer. A first metal bump is on the first BAW bond pad and a second metal bump is on the second BAW bond pad flip chip bonded to the inner bond pads of the oscillator circuit die. A polymer material is in a portion of a gap between the BAW and oscillator circuit die.
Public/Granted literature
- US20200153387A1 Stacked-Die Bulk Acoustic Wave Oscillator Package Public/Granted day:2020-05-14
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