Invention Grant
- Patent Title: Bulk-acoustic wave resonator
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Application No.: US16388979Application Date: 2019-04-19
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Publication No.: US10892737B2Publication Date: 2021-01-12
- Inventor: Won Han , Tae Yoon Kim , Sang Uk Son , Chang Hyun Lim
- Applicant: Samsung Electro-Mechanics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: NSIP Law
- Priority: KR10-2019-0012938 20190131
- Main IPC: H03H9/54
- IPC: H03H9/54 ; H03H9/13 ; H03H9/205 ; H03H9/02

Abstract:
A bulk-acoustic wave resonator includes a substrate; a membrane layer forming a cavity with the substrate; a first electrode at least partially disposed on an upper portion of the cavity including an end portion that is thicker than other portions of the first electrode; an insertion layer including a first portion disposed adjacent to from the end portion of the first electrode and a second portion disposed on an upper portion of the first electrode; a piezoelectric layer disposed to cover the insertion layer; and a second electrode disposed on an upper portion of the piezoelectric layer.
Public/Granted literature
- US20200252051A1 BULK-ACOUSTIC WAVE RESONATOR Public/Granted day:2020-08-06
Information query
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