Invention Grant
- Patent Title: Thin film stacks
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Application No.: US16306607Application Date: 2016-09-26
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Publication No.: US10894406B2Publication Date: 2021-01-19
- Inventor: Zhizhang Chen , Mohammed S Shaarawi , Jeremy Sells
- Applicant: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.
- Applicant Address: US CO Fort Collins
- Assignee: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.
- Current Assignee: HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.
- Current Assignee Address: US CO Fort Collins
- Agency: Thorpe North & Western LLP
- International Application: PCT/US2016/053697 WO 20160926
- International Announcement: WO2018/057028 WO 20180329
- Main IPC: B41J2/14
- IPC: B41J2/14 ; B41J2/16 ; C23C4/134 ; C23C4/04 ; C23C16/455

Abstract:
A thin film stack can include a metal substrate having a thickness of from 200 angstroms to 5000 angstroms and a passivation barrier disposed on the metal substrate at a thickness of from 600 angstroms to 1650 angstroms. The passivation barrier can include a dielectric layer and an atomic layer deposition (ALD) layer disposed on the dielectric layer. The dielectric layer can have a thickness of from 550 to 950 angstroms. The ALD layer can have a thickness from 50 to 700 angstroms.
Public/Granted literature
- US20190217613A1 THIN FILM STACKS Public/Granted day:2019-07-18
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